Two strategic focus areas in the cleanroom are within quantum devices and microwave/photonic devices. Both rely on our strength and strong heritage within nanoscale lithography.
The Microwave and Photonics Processing Line encompasses a complete set of process tools from material growth to packaging where either access is limited to microwave or photonic devices or where only approved processes can be run. The Line supports complex fabrication of high-quality III-V components with fairly large number of mask layers, such as transistors, varactors and lasers.
In a similar way the Quantum Device Line supports fabrication of state-of-the-art quantum devices such as single electron transistors and qubits.
The nanofabrication laboratory has 193 process tools available for fabrication and characterization at the micro/nano-scale.
Head of laboratory and staff
Publications in Chalmers Research
We continually document our research in various types of publications, which are registered in Chalmers Research. Follow this link to see recent publication lists
The Nanofabrication Laboratory is a clean room facility for research and development in micro and nanotechnology. You wi...