Microwave & Photonic Processing Line

​The microwave and photonic processing line consists of a complete set of process tools for the fabrication of microwave and photonic devices and components. Process tools which make up the line are either strictly limited to microwave/photonic devices, or have a limited number of approved processes which have been demonstrated to not have any adverse effects on microwave/photonic processing. The line has resulted in improved stability, quality, and yield in the complicated process flows used in wide bandgap, low-noise, photonic, and terahertz devices. These are finding use in, for example, space applications for projects run through the European Space Agency. The materials processed on this line are predominantly SiC, GaN, and InP based MMICs as well as GaAs based VCSELs.

Page manager Published: Fri 12 Apr 2013.