Lectures schedule are preliminary set up as below
The lectures will be added up with 2 problem solving sessions; where appropriate problems for the different processing techniques will be scrutinized in more detail.
Lecture overview VT 2019
Lecture 3 TCAD (Hans Hjelmgren)
Lecture 4 Optical lithography; exposure modes-resist technology etc (Piotr Jedrasik)
Lecture 5 Non-optical lithography; exposure modes-resist technology etc (Piotr Jedrasik)
Lecture 6 Vacuum and plasma science (Mats Hagberg)
Lecture 7 Etching; dry and wet processing (Karin Hedsten)
Lecture 8 Evaporation and sputtering (Mats Hagberg)
Lecture 9 PLD-Pulsed laser deposition (Andrei Vorobiev)
Lecture 10 CVD and Epitaxy (Martin Hollertz)
Lecture 11 MEMS (Karin Hedsten)
Problem Solving Tutorial 1: Diffusion, oxidation, Thin film Deposition (Martin Hollertz)
Problem Solving Tutorial 2: Dry and wet etching, MEMS (Karin Hedsten)
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