X-ray photoelectron spectrometer (XPS)

​PHI VersaProbe III

X-ray photoelectron spectroscopy (XPS), or electron spectroscopy for chemical analysis (ESCA), is a material characterisation method that provides elemental and chemical information for solid sample with the analysing depth in few atomic layers. XPS is a valuable instrument in surface science like thin films, coatings and native oxide layers study. Wide range of materials like metals, semiconductors, ceramics, polymers and composite materials, regardless of electrical conductivity, can be analysed. The outlined description about an XPS analysis include X-ray irradiation, photoelectron excitement and electron’s kinetic energy measurement. Characteristic energies of the excited photoelectrons from different electron shells of elements can be distinguished and presented as peaks at different positions in the XPS spectrum, with which the chemical composition and the chemical state of the individual element can be characterised. The precision of an analysing area is in micron, depends on the size of the adjustable focused X-ray beam.

The XPS instrument at Chalmers Materials Analysis Laboratory is a PHI 5000 VersaProbe III Scanning XPS Microprobe and is hosted by the Department of Industrial and Materials Science. Together with the traditional spectroscopic and depth profiling functions, large and small area X-ray mapping and angle-resolving analysis are the two special features in this model for fine features imaging and non-destructive ultra-thin films analyses.

Should you need to book, or seek further information about the instrument or measuring technique, please contact Eric Tam, Research Engineer at the Department of Industrial and Material Science.

Instrument data

X-ray sources:

Monochromated aluminium (Al) source;
Magnesium (Mg) source;
Zirconium (Zr) source
​Measured energy range:

​​Mg source: 0 – 1253.3 eV;
Monochromated Al source: 0 – 1486.6 eV;
Zr source: 0 – 2042.4 eV 
Ultimate X-ray resolution: 20.0 µm
Ultimate energy resolution: ≤ 0.50 eV
Charge compensation: Ion gun (Ar+) & electron neutraliser (e-)
Sample dimension:

Preferable: ≤ 25 mm x 7 mm (diameter x height)
Max.: 50 mm x 7 mm (diameter x height).

Published: Fri 01 Feb 2019.