LEO Ultra 55

The LEO Ultra 55 is a dedicated high vacuum and high resolution SEM that allows for imaging with a resolution down to 1 nm. The instrument has a field emission gun and is also equipped with an EDX (energy dispersive X-ray) detector for chemical analysis, an EBSD (electron backscattered diffraction) detector for grain orientation and texture analysis, and a STEM (scanning transmission electron microscopy) detector for thin foil analysis.
For more information, please contact Research Engineer Ludvig de Knoop​ or Stefan Gustafsson.

Instrument data:

•    Spatial resolution:
     15 kV: 1.0 nm
     1 kV: 1.7 nm
     0.1 kV: 4.0 nm
•    Operating voltage: 0.1 - 30 kV
•    Probe current: 4 pA - 10 nA
•    Field emission gun (FEG)
•    Equipped with:
     - Oxford Inca EDX system
     - EBSD system
     - STEM detector

Page manager Published: Fri 25 Mar 2022.