LEO Ultra 55

The LEO Ultra 55 is a dedicated high vacuum and high resolution SEM that allows for imaging with a resolution down to 1 nm. The instrument has a field emission gun and is also equipped with an EDX (energy dispersive X-ray) detector for chemical analysis, an EBSD (electron backscattered diffraction) detector for grain orientation and texture analysis, and a STEM (scanning transmission electron microscopy) detector for thin foil analysis.
The instrument can be booked here. For more information, please contact Research Engineer Stefan Gustafsson or Research Engineer Reza Zamani.

Instrument data:

•    Spatial resolution:
     15 kV: 1.0 nm
     1 kV: 1.7 nm
     0.1 kV: 4.0 nm
•    Operating voltage: 0.1 - 30 kV
•    Probe current: 4 pA - 10 nA
•    Field emission gun (FEG)
•    Equipped with:
     - Oxford Inca EDX system
     - EBSD system
     - STEM detector

Published: Tue 17 Jun 2014. Modified: Tue 20 Mar 2018