Cleanroom Access

The Nanofabrication Laboratory hosted employees from 11 different industrial partners in 2004. After completing the mandatory Cleanroom Introduction Course and receiving the necessary training on the desired process tools, our partners' employees have equal access to the Laboratory as our own researchers and engineers. Access to a state-of-the-art laboratory can be thus realized without the prohibitive capital investment required to begin such operations, or can serve as a backup to our partners' own facilities. In addition, the Laboratory provides a creative environment where lab users work together to solve processing problems.

One example of a partner with Cleanroom Access is Midorion AB, an innovative company developing and marketing analytical biosensor systems for life science applications. The firm uses MEMS technology to measure quantum electrical phenomena in real time through changes in electric fields. A number of employees have access to the Process Laboratory and carry out both production and R&D in close partnership with researchers at Chalmers.

  • Your own employees access our state-of-the-art research laboratory
  • Creative & innovative environment
  • Education & training available

Research collaboration

Research partnerships between Chalmers and external organizations allow for the closest collaboration and the greatest potential innovation and value. Research projects are typically long term with the aim of exploring and developing new technologies. Cleanroom processing in combination with strong theoretical support in close cooperation with the partner organization results in breakthrough technologies. Research groups at Chalmers have unique expertise in the physics & technology of materials, devices, and circuits for micro and nano systems. Detailed information on the research carried out at MC2 can be found in the department’s Annual Report.

Philips Semiconductor is one example of an organization which has entered a research partnership with Chalmers. Philips transferred its SiC process research from its own research centre to the Microwave Electronics Laboratory at Chalmers to investigate the potential of SiC MOSFETs for RF applications. This collaboration has resulted in MC2 producing MOSFETs with world record mobility in the inversion channel. The project was recently extended to investigate the manufacturability of these devices while further developing the technology.

  • Partner with leading researchers from across Chalmers University of Technology
  • Innovative R&D solutions for industry & academia
  • Responsive to our partners' needs

Processing, prototypes & consultancy

Processing, prototype fabrication, and consultancy services are provided professionally and confidentially by the The Process Laboratorie's own full time engineering staff. These projects are typically of shorter time frame than research collaborations, and can range anywhere from cleanroom processing according to specs given by the partner to developing a whole process flow in the cleanroom.

Chalmers' vast competence within nanolithography is a particularly popular service. Examples of projects carried out with our partners include the fabrication of diffractive optical element masters and direct write patterning. Thin film deposition of oxides, nitrides or metals is another common service the Laboratory provides, often in combination with photolithography and/or plasma processing.

Professional, confidential, and expert cleanroom engineering staff
Fabrication according to your specs
Process development to meet the functionality you require

External Processing Coordinator
Göran Alestig
Phone: +46 (0)31 772 8496

Starting a project

Below is a short description of the steps you need to take to start a project at the Nanofabrication Laboratory. Should you at any point want more information, please feel free to contact us.

  • Review the MC2 web site for information on the capabilities of the laboratory.
  • Decide on which Partnership Option best suits your project. Please use the contacts given if you need more information or want to discuss any details of your project.
  • Contact Göran Alestig (see below) to arrange a suitable contract for your work .
  • If you plan to work yourself in the laboratory, you must take the Cleanroom Introduction Course.
  • Before you can start work in the laboratory, you must also get a "Driver's Licence" on the processing tools you plan to use. More information on this will be given in the Cleanroom Introduction Course.

External Processing Coordinator
Göran Alestig
Phone: +46 (0)31 772 8496