Nanofabrication Laboratory



The laboratory is run by the Department of Microtechnology and Nanoscience at Chalmers, but is an open user facility for external as well as internal academic and industrial interests. The Nanofabrication Laboratory offers a broad platform of process tools for the development and testing of new ideas in micro and nanotechnology. Two strategic focus areas in the cleanroom are within quantum devices and microwave/photonic devices. Both rely on our strength and strong heritage within nanoscale lithography.
The Microwave and Photonics Processing Line encompasses a complete set of process tools from material growth to packaging where either access is limited to microwave or photonic devices or where only approved processes can be run. The Line supports complex fabrication of high-quality III-V components with fairly large number of mask layers, such as transistors, varactors and lasers. In a similar way the Quantum Device Line supports fabrication of state-of-the-art quantum devices such as single electron transistors and qubits. The nanofabrication laboratory has 193 process tools available for fabrication and characterisation at the micro/nano-scale.​ It is a facility within Myfab, the Swedish Research Infrastructure for Micro and Nano Fabrication, www.myfab.se.






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Published: Thu 06 Sep 2012. Modified: Mon 05 Sep 2016