Master's thesis presentation: Simin Zare Hajibagher, MPNAT

​Title: Optimization of CMOS-Compatible Microsupercapacitor Fabrication for Diverse Electrodes

Supervisor: Agin Vyas
Examiner: Prof. Peter Enoksson
Opponent: Nooshin Sharafi


The explosion of the electrical industry and, consequently, the surge of need for energy and energy storage has changed our world significantly. By developing the most recent technologies such as the Internet of Things (IoT), nanosensors, wearable devices, and electric cars, batteries have proven to be insufficient energy reservoirs due to their large size, weight, short life, long charging time, and low power densities. To overcome such obstacles for advancements of IoT based platform, this is crucial to develop a new generation of energy storage devices that address these problems. Microsupercapacitors are small devices expected to satisfy energy consumption for light energy consumer devices for low consumption purposes. They can provide high power density, short charging time, longer lifetime, and durability. These properties put microsupercapacitors on advantage compared to batteries when it comes to a reliable energy source for IoTs, MEMS, and nanosensors. This research focuses on developing microsupercapacitors through a Complementary metal-oxide-semiconductor (CMOS) compatible process, applicable in many fields as mentioned earlier of application, such as Power Electronics, Memory Protection, Battery Enhancement, Portable Energy Sources. Power Quality Improvement, and Hybrid Electric Vehicles. The fabrication process is carried out in several steps of PVD metal evaporation, lithography, plasma etching, and spin coating. This thesis was conducted to study the effect of different electrode materials using diverse carbon-based electrode materials.

The process, the challenges, and the optimization process for these fabrication steps have been addressed. The fabrication process steps were monitored by optical microscopy. Characterization consisted of surface profiling and electrochemical analysis, including chronopotentiometry, cyclic voltammetry, and hybrid EIS tests.

Category Student project presentation
Location: Kollektorn, lecture room, Kemivägen 9, MC2-huset
Starts: 20 October, 2020, 13:00
Ends: 20 October, 2020, 14:00

Published: Wed 14 Oct 2020.