The nano & quantum technology line serves to increase the Laboratory’s ability to produce state-of-the-art superconducting and quantum devices and novel nano components in higher yield. The line is anchored around Chalmers’ long history and competence within electron beam lithography. Particular focus is being laid on attaining high yield on structures smaller than 20nm. With research and development in nanotechnology booming, this process line positions Chalmers to continue to be innovative for years to come. A very broad range of applications is served by this line, from bioelectronics to single electron devices.