The Nanofabrication Laboratory is a world-class university cleanroom for research into and fabrication of micro and nanotechnology. It is managed by the Department of Microtechnology and Nanoscience (MC2)at Chalmers, but is an open facility for the entire university as well as external academic and commercial interests.
Cleanroom operation in its current form was started in 2001. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology. The Laboratory is also a member of µ-Fab, the Swedish micro and nano fabrication network supported by The Swedish research council, SSF, Vinnova and Knut and Alice Wallenberg Foundation. This gives access to a larger infrastructure through the Microstructure Laboratory at Uppsala University and the Electrum Laboratory at KTH in Stockholm.
MC2’s two strategic focus areas have recently resulted in the launch of two processing lines in the Laboratory to complement the flexible processing and materials environment. The lines increase the quality, throughput, and stability of the microwave & nano/quantum devices and components fabricated in the Laboratory. Read more about the lines via the menu to the left.
Last modified: January 04, 2008
Responsible for this page: Peter Modh