The LEO Ultra 55 is a dedicated high vacuum and high resolution SEM that allows for imaging with a resolution down to 1 nm. The instrument has a field emission gun and is also equipped with an EDX (energy dispersive X-ray) detector for chemical analysis, an EBSD (electron backscattered diffraction) detector for grain orientation and texture analysis, and a STEM (scanning transmission electron microscopy) detector for thin foil analysis.
The instrument can be booked
here. For more information, please contact Research Engineer
Stefan Gustafsson.
Instrument data:
• Spatial resolution:
15 kV: 1.0 nm
1 kV: 1.7 nm
0.1 kV: 4.0 nm
• Operating voltage: 0.1 - 30 kV
• Probe current: 4 pA - 10 nA
• Field emission gun (FEG)
• Equipped with:
- Oxford Inca EDX system
- EBSD system
- STEM detector