Micro and nanoprocessing technologies

MNT VT 2016 Course info and schedule

Lectures are preliminary set up as below and a preliminary detailed schedule as in PDF to download. The old presentations from Q3-2015 are available to download. The lecture PDF for 2016 will be available as the course is going on!
The lectures will be added up with 3 problem solving sessions; where appropriate problems for the different processing techniques will be scrutinized in more detail. If anyone has some special wishes, we are open to discuss the content and change somewhat if appropriate!

Lecture overview VT 2016:
Lecture 1 Introduction/Substrates/Diffusion (Ulf Södervall) Lecture handouts
Lecture 2 Thermal Oxidation, RTP and Implantation (Ulf Södervall) Lecture handouts
Lecture 3 TCAD (Hans Hjelmgren) Lecture handouts: 1. Introduction, 2. Process
Lecture 4 Optical lithography; exposure modes-resist technology etc (Piotr Jedrasik) Lecture handouts: 1. Optical litography, 2. Photoresists
Lecture 5 Non-optical lithography; exposure modes-resist technology etc (Piotr Jedrasik) Lecture handouts: 1. Non-optical litographies A, 2. Non-optical litographies B
Lecture 6 Vacuum and plasma science (Mats Hagberg) Lecture handouts
Lecture 7 Etching; dry and wet processing (Göran Alestig) Lecture handouts
Lecture 8 Evaporation and sputtering (Mats Hagberg) Lecture handouts
Lecture 9 PLD-Pulsed laser deposition (Andrei Vorobiev) Lecture handouts
Lecture 10 CVD and Epitaxy (Martin Hollertz) Lecture handouts
Lecture 11 Device isolation, metallization, contacts& Device technologies (Göran Alestig) Lecture handouts

Lecture overview VT 2015:
Lecture 12 MEMS (Karin Hedsten) Lecture handouts: 1. MEMS Fabrication, 2. Wafer bonding for MEMS
Lecture 13 Microfluidic structures (Caroline Adiels) Lecture handouts
Lecture 14 Colloidal lithography (Svetlana Syrenova) Lecture handouts
Problem Solving Tutorial 1; Diffusion, oxidation, Lithography (Göran Alestig)
Problem Solving Tutorial 2; Thin film growth, Deposition techniques (Göran Alestig)
Problem Solving Tutorial 3; Dry and wet etching; Device technologies (Göran Alestig)

Published: Tue 10 Sep 2013. Modified: Fri 04 Mar 2016