Arrival of New Scanning XPS Microprobe at Chalmers

​A new X-ray photoelectron spectrometer (XPS), valued at ~ 6 million SEK, will soon become available to researchers at Chalmers.

VersaProbe III from Physical Electronics is a unique scanning x-ray monochromator XPS instrument. It is the newest model, which was launched into the market in the late spring of this year. Housed in the department of Materials and Manufacturing Technology, the installation of the new instrument is scheduled for September 26th, and the running is expected to be in October, 2016.

XPS is the most widely used surface analysis technique with a typical analysis depth of less than 5 nm. It is therefore suited for ultra-thin layers and thin microscale sample features. A wide range of materials can be analysed including both conductive and nonconductive ones. VersaProbe III provides quantitative and chemical state as well as depth distribution information of materials with a lateral spatial resolution smaller than 10 µm. The core technology is monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 10 µm. Some other features of the VersaProbe III include improved sensitivity for all analysis conditions; multi-channel detector for faster elemental and chemical imaging; angle dependent technology for +/- 5 degree solid angle collection for ADXPS measurements, X-ray beam induced secondary electron imaging for sample viewing.

It is believed that this surface analysis instrument will play a critical role in the field such as metallurgy, energy, medical, polymers, thin films, magnetic media and microelectronics. This instrument is available for use by researchers at Chalmers. 

For questions and future booking, please contact:

Associate professor Yu Cao,, +46-31-772 1252

Professor Lars Nyborg,, +46 31-772 1257

Page manager Published: Wed 02 Sep 2020.